Measure the reflectivity of the target film, accurately measure the film thickness and optical constants! Non contact, Non destructive, Microscopic
The measurement time is only 1 second!
The OPTM series spectrophotometer uses microscopic spectroscopy to measure reflectance in small areas, allowing for high-precision analysis of film thickness/optical constants. Measure the thickness of coatings through non-destructive and non-contact methods, such as various films, chips, optical materials, and multilayer films. In terms of measurement time, it can achieve high-speed measurement of 1 second per point, and is equipped with software that can easily analyze optical constants even for first-time users
Product features:
The head integrates the necessary functions for measuring film thickness
Measurement of high-precision reflectance (multilayer film thickness, optical constants) using microspectroscopy
1:1 high-speed measurement
Optical system with wide range under microscopic spectroscopy (UV * * * near-infrared)
Security mechanism of regional sensors
Easy to analyze guide, beginners can also perform optical constant analysis
Independent measuring heads correspond to various inline customization requirements
Support various customizations
Measurement items:
**Reflectance measurement
Analysis of multilayer films
Optical constant analysis (n: refractive index, k: extinction coefficient)
Application:
Semiconductor: automatic adjustment of wafer samples, wafer bending detection
Optical components: detection of emissivity, bending, and other parameters of lens lenses
Product specifications and models:
OPTM-A1 |
OPTM-A2 |
OPTM-A3 |
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Wavelength Range |
230 ~ 800 nm |
360 ~ 1100 nm |
900 ~ 1600 nm |
Film thickness range |
1nm ~ 35μm |
7nm ~ 49μm |
16nm ~ 92μm |
Measurement time |
1 second/1 o'clock |
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spot size |
10 μ m (* * * less than about 5 μ m) |
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Photosensitive element |
CCD |
InGaAs |
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Light source specifications |
Deuterium lamp+halogen lamp |
halogen lamp |
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Power specifications |
AC100V ± 10V 750VA (Automatic Sample Stand Specification) |
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size |
555 (W) × 537 (D) × 568 (H) mm (Main body of automatic sample table specification) |
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weight |
About 55kg (the main part of the automatic sample table specification) |